FOOTPRINT Optimization / FFU Differential-Pressure Interaction Mode / Enable smooth top down air flow with enclosure structure
OPTION : Pre-ALIGNER, SIDE STORAGE。
主要特征：
■ Carrier : 300mm FOUP (SEMI E47.1-1101)
■ Cleanliness : ISO Class1
■ Repeatability : ±0.1mm
■ Electric Supply : 208VAC±10%, 3Phase
■ Acoustic Noise : < 70dB
■ Communication : Ethernet
